Demonstration of HfO<sub>2</sub>-Based Gate Dielectric With ~0.8-nm Equivalent Oxide Thickness on Si<sub>0.8</sub>Ge<sub>0.2</sub> by Trimethylaluminum Pre-Treatment and Al Scavenger

نویسندگان

چکیده

We disclosed HfO2-based dielectric of superb electrical properties on p-type Si0.8Ge0.2 substrate using an interfacial layer (IL) formed by trimethylaluminum (TMA) pre-treatment and Al scavenger. Our results revealed that the interface trap density (Dit) value gate leakage current (JG) could be improved about 60 times 100 tuning electrode composition without sacrificing equivalent oxide thickness (EOT) performance. The mechanism underlying ${\mathrm{ D}}_{\mathrm{ it}}$ improvement SiGe metal-oxide-semiconductor capacitors (MOSCAPs) might owing to metal scavenger minimization oxygen atoms diffusing high- notation="LaTeX">$\kappa $ /SiGe IL, verified x-ray photoelectron spectroscopy (XPS) analyses. In addition, hysteresis levels with various electrodes were measured find out optimized configuration electrodes. This work demonstrated effect from aspects both material achieved impressive EOT notation="LaTeX">$\sim 0.8$ nm for fabricated substrate.

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ژورنال

عنوان ژورنال: IEEE Journal of the Electron Devices Society

سال: 2023

ISSN: ['2168-6734']

DOI: https://doi.org/10.1109/jeds.2023.3271063